Publication:

HF etching mechanisms of advanced low-k films

Date

2014

Proceedings Paper

Simple item page Full metadata Statistics

Files

29241.pdf 448.14 KB

Author(s)

Verdonck, Patrick

;

;

Krishtab, Mikhail

;

Vanstreels, Kris

;

;

;

Nguyen, Mai Phuong

;

Van Elshocht, Sven

;

Baklanov, Mikhaïl

Statistics

1937 since deposited on 2021-10-22

5last month

Acq. date: 2026-08-23