Publication:

E-test validation of space error budget and metrology

Date

2022-06-30
Journal article
https://doi.org/10.1109/TSM.2022.3187448
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Accepted version 2.22 MB

Author(s)

Schelcher, Guillaume  
;
De Poortere, Etienne P.
;
Kissoon, Nicola
;
Paolillo, Sara  
;
e Silva, Marsil A. C.
;
Zhang, Yichen
;
Tabery, Cyrus
;
Mulkens, Jan
;
McManus, Moyra
;
Leray, Philippe  
;
Halder, Sandip  

Journal

IEEE Transactions on Semiconductor Manufacturing

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