Publication:

Advanced organic polymers for the aggressive scaling of low-k materials

Date

2011

Journal article

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Files

22103.pdf 1.12 MB

Author(s)

Pantouvaki, Marianna

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Baklanov, Mikhaïl

Journal

Japanese Journal of Applied Physics

Statistics

1908 since deposited on 2021-10-19

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Acq. date: 2026-10-12