Publication:
Challenges and solutions of replacement metal gate patterning to enable gate-all-around device scaling
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2414 since deposited on 2021-10-31
27last month
9last week
Acq. date: 2026-08-22
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Statistics
Views
2414 since deposited on 2021-10-31
27last month
9last week
Acq. date: 2026-08-22
Citations