Publication:
1-D model of RF CCP discharge in Ar/CF4/CF3I gas mixtures
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
2114 since deposited on 2021-10-21
1last month
Acq. date: 2026-10-12
Citations
Statistics
Views
2114 since deposited on 2021-10-21
1last month
Acq. date: 2026-10-12
Citations