Publication:
Impact of plasma pretreatment and pore size on the sealing of ultra low-k dielectrics by self-assembling monolayers
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
1903 since deposited on 2021-10-22
1last month
Acq. date: 2026-10-12
Citations
Statistics
Views
1903 since deposited on 2021-10-22
1last month
Acq. date: 2026-10-12
Citations