Publication:
Observation of plasma-induced damage in bulk germanium p-type FinFET devices and curing in high-pressure anneal
Date
Loading...
Journal
Abstract
Description
Statistics
Views
2050 since deposited on 2021-10-27
4last month
1last week
Acq. date: 2026-08-21
Citations
Statistics
Views
2050 since deposited on 2021-10-27
4last month
1last week
Acq. date: 2026-08-21
Citations