Publication:
Fundamental study of ion-substrate interactions with low energy reactive ions
Date
| dc.contributor.advisor | Gijbels | |
| dc.contributor.advisor | Vandervorst, Ir. W. | |
| dc.contributor.author | De Witte, Hilde | |
| dc.date.accessioned | 2021-10-14T16:48:15Z | |
| dc.date.available | 2021-10-14T16:48:15Z | |
| dc.date.issued | 2001-03 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5220 | |
| dc.title | Fundamental study of ion-substrate interactions with low energy reactive ions | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |