Publication:

SAQP and EUV block patterning of BEOL metal layers on IMEC's iN7 platform

Date

2017
Proceedings Paper
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Author(s)

Bekaert, Joost  
;
Di Lorenzo, Paolo
;
Mao, Ming  
;
Decoster, Stefan  
;
Lariviere, Stephane  
;
Franke, Joern-Holger
;
Blanco, Victor  
;
Kutrzeba Kotowska, Bogumila  
;
Lazzarino, Frederic  
;
Gallagher, Emily  
;
Hendrickx, Eric  
;
Leray, Philippe  
;
Kim, Ryan Ryoung han
;
McIntyre, Greg
;
Colsters, Paul
;
Wittebrood, Friso
;
van Dijk, Joep
;
Maslow, Mark
;
Timoshkov, Vadim
;
Kiers, Ton

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2110 since deposited on 2021-10-24
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Acq. date: 2026-05-31

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