Modification of OSG based low-k films under EUV and VUV exposure

Rakhimova, T.; Rakhimov, A.; Mankelevich, Y.; Lopaev, D.; Kovalev, A.; Vasil'eva, A.; Proshina, O.; Braginsky, O.; Zyryanov, S.; Kurchikov, K.; Novikova, N.; Baklanov, Mikhaïl

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Modification of OSG based low-k films under EUV and VUV exposure

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2013

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Applied Physics Letters

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Modification of OSG based low-k films under EUV and VUV exposure

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