Publication:

Etching of molybdenum via a combination of low-temperature ozone oxidation and wet-chemical oxide dissolution

Date

2023
Journal article
https://doi.org/10.1116/6.0002404
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Author(s)

Pacco, Antoine  
;
Nakano, Teppei
;
Iwahata, Shota
;
Iwasaki, Akihisa
;
Altamirano Sanchez, Efrain  

Journal

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

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