Publication:
First demonstration of ruthenium and molybdenum word lines integrated into 40nm ptch 3D NAND memory devices
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2032 since deposited on 2021-10-31
9last month
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Acq. date: 2026-08-20
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Statistics
Views
2032 since deposited on 2021-10-31
9last month
4last week
Acq. date: 2026-08-20
Citations