Publication:
Metal gate work function tuning by Al incorporation in TiN
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Acq. date: 2026-06-03
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Acq. date: 2026-06-03
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1 since deposited on 2021-10-22
Acq. date: 2026-06-03
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1998 since deposited on 2021-10-22
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Acq. date: 2026-06-03
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