Publication:

Characterization and optimization of Cu-low k for 45nm and beyond

Date

2004

Proceedings Paper

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Files

16390.pdf 4.05 MB

Author(s)

;

Brongersma, Sywert

;

Iacopi, Francesca

;

Travaly, Youssef

;

;

Bruynseraede, Christophe

;

Statistics

1972 since deposited on 2021-10-15

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Acq. date: 2026-10-12