Publication:
Characterization of metal permeation in porous low-k films by spectroscopic ellipsometry
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1877 since deposited on 2021-10-21
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Acq. date: 2026-10-12
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Statistics
Views
1877 since deposited on 2021-10-21
1last month
1last week
Acq. date: 2026-10-12
Citations