Publication:

In situ studies of Al2O3 ALD growth and self-cleaning on III-V surfaces by STM and XPS

Date

2012

Meeting abstract

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Files

25865.pdf 71.18 KB

Author(s)

Rodriguez, Leonard

;

De Clercq, Astrid

;

Tallarida, Massimo

;

Cuypers, Daniel

;

Locquet, Jean-Pierre

;

Van Elshocht, Sven

;

Adelmann, Christoph

;

Statistics

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Acq. date: 2026-05-30