Publication:

Dipole-First Gate Stack as a Scalable and Thermal Budget Flexible Multi-Vt Solution for Nanosheet/CFET Devices

Date

2021
Proceedings Paper
https://doi.org/10.1109/iedm19574.2021.9720527
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Author(s)

Arimura, Hiroaki  
;
Ragnarsson, Lars-Ake  
;
Oniki, Yusuke  
;
Franco, Jacopo  
;
Vandooren, Anne  
;
Brus, Stephan  
;
Leonhardt, A.
;
Sippola, P.
;
Ivanova, T.
;
Verni, G. Alessio
;
Chang, R-J
;
Xie, Q.
;
Givens, M.
;
Mitard, Jerome  
;
Biesemans, Serge  
;
Dentoni Litta, Eugenio  
;
Horiguchi, Naoto  

Journal

na

Abstract

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1894 since deposited on 2022-07-09
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Acq. date: 2026-10-13

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