Publication:

Direct yield prediction from SEM images

Date

2023

Proceedings Paper

https://doi.org/10.1117/12.2658294

Simple item page Full metadata Statistics

Author(s)

;

Linshiz, Jasmine

;

;

;

;

Santoro, Gaetano

;

Baudot, Sylvain

;

;

Reifsnider, Jason

;

Vadakupudhu Palayam, Senthil

;

;

;

Journal

Proceedings of SPIE

Statistics

779 since deposited on 2023-07-28

4last month

Acq. date: 2026-08-20