Publication:

EUV lithography implementation on contact and metal interconnect level of a 22nm node 0.099um2 6T-SRAM cell

Date

2009

Proceedings Paper

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Files

18872.pdf 5.27 MB

Author(s)

Goethals, Mieke

;

Demuynck, Steven

;

Van Roey, Frieda

;

Baudemprez, Bart

;

;

;

Lazzarino, Frederic

;

Pollentier, Ivan

;

Hendrickx, Eric

;

Jonckheere, Rik

;

Verhaegen, Staf

;

Veloso, Anabela

;

Vandenberghe, Geert

;

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Acq. date: 2026-05-29