Extreme Ultraviolet Lithographic Performance and Reaction Mechanism of Polymeric Resist-Utilizing Radical- and Acid-Amplified Cross-Linking

Publication:

2024

Journal article

Author(s)

;

;

;

;

;

;

;

CHEMISTRY OF MATERIALS

641 since deposited on 2024-02-18

2last month

Acq. date: 2026-06-03