Experimental studies of dose retention and activation in fin field-effect-transistor-based structures

Mody, Jay; Duffy, Ray; Eyben, Pierre; Goossens, Jozefien; Moussa, Alain; Polspoel, Wouter; Berghmans, Bart; Van Dal, Mark; Pawlak, Bartek; Kaiser, Monja; Weemaes, R. G. R.; Vandervorst, Wilfried

Publication:

Experimental studies of dose retention and activation in fin field-effect-transistor-based structures

Date

2010

Journal article

Simple item page Full metadata Statistics

Files

19604.pdf 4.78 MB

Author(s)

;

;

;

;

;

;

;

;

;

;

;

Vandervorst, Wilfried

Journal

Journal of Vacuum Science and Technology B

Statistics

2009 since deposited on 2021-10-18

3last month

Acq. date: 2026-08-14

Experimental studies of dose retention and activation in fin field-effect-transistor-based structures

Date

Files

Author(s)

Journal

Abstract

Description

Statistics

Views

Citations

Statistics

Views

Citations