Publication:
The formation and removal of residue formed during TiN fluorocarbon plasma etching
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1897 since deposited on 2021-09-30
15last month
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Acq. date: 2026-10-13
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Statistics
Views
1897 since deposited on 2021-09-30
15last month
6last week
Acq. date: 2026-10-13
Citations