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Improved electrical and reliability characteristics of HfN/HfO2 gated nMOSFET with 0.95 nm EOT fabricated using a gate-first process

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1931 since deposited on 2021-10-16
7last month
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Acq. date: 2026-08-16

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1931 since deposited on 2021-10-16
7last month
2last week
Acq. date: 2026-08-16

Citations