Publication:
Mechanism of k-value reduction of PECVD Low-k films treated with He/H2 ash plasma
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1841 since deposited on 2021-10-18
1last month
Acq. date: 2026-06-03
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Statistics
Views
1841 since deposited on 2021-10-18
1last month
Acq. date: 2026-06-03
Citations