Publication:

Wafer-level packaged RF-MEMS switches fabricated in a CMOS fab

Date

2001

Proceedings Paper

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Author(s)

Tilmans, Harrie

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;

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Di Monaco, Orsola

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;

De Raedt, Walter

;

Rottenberg, Xavier

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De Caussemaeker, Ann

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Statistics

2029 since deposited on 2021-10-14

Acq. date: 2026-06-04