Publication:

Ultra low-k dielectrics damage under VUV and EUV radiation

Date

2012
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Author(s)

Zyryanov, S.
;
Braginsky, O.
;
Kovaev, A.
;
Lopaev, D.
;
Mankelevich, Y.
;
Rakhimova, T.
;
Rakhimov, A.
;
Vasilieva, A.
;
Baklanov, Mikhaïl

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