Publication:

Dielectric reliability of 70 nm pitch air-gap interconnect structures

Date

2011
Journal article
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

22759.pdf 928.92 KB

Author(s)

Pantouvaki, Marianna  
;
Sebaai, Farid  
;
Kellens, Kristof  
;
Goossens, Danny  
;
Vereecke, Bart  
;
Versluijs, Janko  
;
Van Besien, Els  
;
Caluwaerts, Rudy  
;
Marrant, Koen
;
Bender, Hugo  
;
Moussa, Alain  
;
Struyf, Herbert  
;
Beyer, Gerald  

Journal

Microelectronic Engineering

Abstract

Description

Statistics

Views

1984 since deposited on 2021-10-19
6last month
1last week
Acq. date: 2026-08-16

Citations

Statistics

Views

1984 since deposited on 2021-10-19
6last month
1last week
Acq. date: 2026-08-16

Citations