Publication:

A Holistic Evaluation of Buried Power Rails and Back-Side Power for Sub-5 nm Technology Nodes

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1441 since deposited on 2022-07-22
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Acq. date: 2026-08-22

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1578 since deposited on 2022-07-22
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Downloads

1441 since deposited on 2022-07-22
124last month
29last week
Acq. date: 2026-08-22

Views

1578 since deposited on 2022-07-22
3last month
Acq. date: 2026-08-22

Citations