Publication:

High-resolution SILC measurements of thin SiO2 at ultra low voltages

Date

2002
Journal article
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Author(s)

Aresu, S.
;
De Ceuninck, Ward  
;
Dreesen, R.
;
Kroes, K.
;
Andries, E.
;
Manca, Jean
;
De Schepper, Luc
;
Degraeve, Robin  
;
Kaczer, Ben  
;
D'Olieslaeger, Marc  
;
D'Haen, Jan  

Journal

Microelectronics Reliability

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