Publication:

AlON gate dielectric and gate trench cleaning for improved relia-bility of vertical GaN MOSFET

Date

2022
Proceedings Paper
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Author(s)

Filho Goncalez, Walter  
;
Borga, Matteo  
;
Geens, Karen  
;
Cingu, Deepthi  
;
Chatterjee, Urmimala  
;
You, Shuzhen  
;
Bakeroot, Benoit  
;
Decoutere, Stefaan  
;
Knaepen, Werner  
;
Arnou, Panagiota  
;
Homm, Pia  

Journal

na

Abstract

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1204 since deposited on 2021-12-03
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1530 since deposited on 2021-12-03
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Acq. date: 2026-08-17

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