Publication:

Status 157nm lithography development at IMEC

Date

2003

Proceedings Paper

Simple item page Full metadata Statistics

Files

7600.pdf 1.7 MB

Author(s)

;

De Bisschop, Peter

;

;

Goethals, Mieke

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;

Jonckheere, Rik

;

Van Den Heuvel, Dieter

;

Van Roey, Frieda

;

;

;

de Marneffe, Jean-Francois

;

O'Neil, Timothy

;

;

Statistics

1910 since deposited on 2021-10-15

Acq. date: 2026-06-05