Publication:

Advanced PnR Logic Patterning Enabled by High-NA EUV Lithography

Date

2025

Proceedings Paper

https://doi.org/10.1117/12.3051054

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Author(s)

Roy, Syamashree

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;

Feurprier, Yannick

;

Franke, Joern-Holger

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;

;

;

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Baskaran, Balakumar

;

;

Nafus, Kathleen

;

Fukui, Nobuyuki

;

Tsuboi, Atsushi

;

Niroomand, Ardavan

;

Gillijns, Werner

;

;

Sherazi, Yasser

;

Journal

Conference on Optical and EUV Nanolithography

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