Publication:

Stress analysis of Si1-xGex embedded source/drain junctions

Date

2008
Journal article
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Author(s)

Bargallo Gonzalez, Mireia
;
Simoen, Eddy  
;
Naka, N.
;
Okuno, Y
;
Eneman, Geert  
;
Hikavyy, Andriy  
;
Verheyen, Peter  
;
Loo, Roger  
;
Claeys, Cor
;
Machkaoutsan, Vladimir  
;
Tomasini, Pierre
;
Thomas, S.G.
;
Lu, J.P
;
Wise, Rick

Journal

Materials Sicience in Semiconductor Processing

Abstract

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