Publication:
Nano-beam diffraction investigation of the strain evolution in SiGe channel pFETs with gate first or gate last process
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1990 since deposited on 2021-10-20
10last month
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Acq. date: 2026-08-16
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Statistics
Views
1990 since deposited on 2021-10-20
10last month
1last week
Acq. date: 2026-08-16
Citations