Publication:

Applications of Ni-based silicides to 45 nm CMOS and beyond

Date

2004

Proceedings Paper

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Author(s)

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Chamirian, Oxana

;

Pawlak, Malgorzata

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de Potter de ten Broeck, Muriel

;

Kottantharayil, Anil

;

Pourtois, Geoffrey

;

Lindsay, Richard

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