Publication:
Exploring double patterning approaches for 22-nm half-pitch gate structures
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1947 since deposited on 2021-10-17
1last month
Acq. date: 2026-05-31
Citations
Statistics
Views
1947 since deposited on 2021-10-17
1last month
Acq. date: 2026-05-31
Citations