Publication:
Comprehensive study of TSUPREM4 boron diffusion modeling in SiGeC base layers under critical RTA conditions
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1972 since deposited on 2021-10-15
3last month
Acq. date: 2026-10-13
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Statistics
Views
1972 since deposited on 2021-10-15
3last month
Acq. date: 2026-10-13
Citations