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Development of a new metallization scheme for making nanoscale interconnects based on plasma-functionalization and electroless deposition
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1904 since deposited on 2021-10-21
4last month
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Acq. date: 2026-10-12
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Statistics
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1904 since deposited on 2021-10-21
4last month
1last week
Acq. date: 2026-10-12
Citations