Publication:

Thin and locally dislocation-free SiGe virtual substrate fabrication by lateral selective growth

Date

2024
Journal article
https://doi.org/10.35848/1347-4065/ad189d
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Author(s)

Yamamoto, Yuji
;
Wen, Wei-Chen
;
Schubert, Markus Andreas
;
Corley-Wiciak, Agnieszka Anna
;
Sugawa, Sho
;
Ito, Yuta
;
Yokogawa, Ryo
;
Han, Han  
;
Loo, Roger  
;
Ogura, Atsushi
;
Tillack, Bernd

Journal

JAPANESE JOURNAL OF APPLIED PHYSICS

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