Publication:

The device architecture dilemma for CMOS technologies: opportunities & challenges of FinFET over planar MOSFET

Date

2009

Proceedings Paper

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Author(s)

Parvais, Bertrand

;

Mercha, Abdelkarim

;

Collaert, Nadine

;

Rooyackers, Rita

;

Ferain, Isabelle

;

;

Subramanian, Vaidy

;

De Keersgieter, An

;

Chiarella, Thomas

;

Kerner, Christoph

;

Witters, Liesbeth

;

Biesemans, Serge

;

Hoffmann, Thomas Y.

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