Publication:

Torsional mode MEMS resonator using thin film vacuum package

Date

2012
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Author(s)

Onishi, K.
;
Naito, Yasuyuki
;
Yamakawa, T.
;
Nakamura, K.
;
Helin, Philippe  
;
De Coster, Jeroen  
;
Haspeslagh, Luc  
;
Tilmans, Harrie  

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