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Correlation between hot carrier stress, oxide breakdown and gate leakage current for monitoring plasma processing induced damage on gate oxide
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1901 since deposited on 2021-10-15
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Acq. date: 2026-08-17
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Statistics
Views
1901 since deposited on 2021-10-15
1last month
1last week
Acq. date: 2026-08-17
Citations