Publication:

Defectivity reduction in EUV resists through novel high-performance Point-Of-Use (POU) filters

Date

2023

Proceedings Paper

https://doi.org/10.1117/12.2660389

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Author(s)

;

;

Sakakibara, Hirokazu

;

Ibrahim, Sheik Ansar Usman

;

Sakamoto, Atsushi

;

Singh, Amarnauth

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;

Skjonnemand, Karl

;

Foubert, Philippe

;

Journal

N/A

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819 since deposited on 2023-07-28

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Acq. date: 2026-06-03