Publication:

Effective use of aerial image metrology for calibration of OPC models

Date

2017

Proceedings Paper

https://doi.org/10.1117/12.2258632

Simple item page Full metadata Statistics

Files

35393.pdf 1.64 MB

Author(s)

;

;

;

Buttgereit, Ute

;

Chung, Angeline

;

Burbine, Andrew

;

Sturtevant, John

;

Clifford, Chris

;

;

De Bisschop, Peter

Statistics

1914 since deposited on 2021-10-24

3last month

Acq. date: 2026-10-12