Publication:

Design and pitch scaling for affordable node transition and EUV insertion scenario

Date

2017
Proceedings Paper
https://doi.org/10.1117/12.2257885
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37540.pdf 2.74 MB

Author(s)

Kim, Ryan Ryoung han
;
Ryckaert, Julien  
;
Raghavan, Praveen
;
Sherazi, Yasser  
;
Debacker, Peter  
;
Trivkovic, Darko  
;
Gillijns, Werner  
;
Tan, Ling Ee  
;
Drissi, Youssef  
;
Blanco, Victor  
;
Bekaert, Joost  
;
Mao, Ming  
;
Lariviere, Stephane  
;
McIntyre, Greg

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