Publication:

Investigation on the use of Al-Ge eutectic bonding in the structure part of a multilayer stacked MEMS device

Date

2024

Proceedings Paper

https://doi.org/10.1109/ectc51529.2024.00342

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Author(s)

;

Mannarino, Manuel

;

;

;

Weidlinger, Gunther

;

Wernicke, Tobias

;

Burggraf, Jurgen

;

Wimplinger, Markus

Journal

N/A

Statistics

246 since deposited on 2024-12-07

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Acq. date: 2026-08-21