Publication:

Technology and reliability of sub-3nm oxides

Date

1999
Proceedings Paper
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Author(s)

Heyns, Marc  
;
Nigam, Tanya
;
Degraeve, Robin  
;
Mertens, Paul  
;
Schaekers, Marc  
;
De Gendt, Stefan  
;
Groeseneken, Guido  
;
Maes, Herman
;
Houssa, Michel  
;
Vandewalle, N.
;
Ausloos, M.

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1998 since deposited on 2021-10-06
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Acq. date: 2026-05-31

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