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Strain determination in silicon microstructures by combined convergent beam electron diffraction, process simulation, and micro-Raman spectroscopy
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1942 since deposited on 2021-10-15
4last month
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Acq. date: 2026-10-12
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Statistics
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1942 since deposited on 2021-10-15
4last month
1last week
Acq. date: 2026-10-12
Citations