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Track height reduction for standard-cell in below 5nm node: How low can you go?

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2 since deposited on 2021-10-26
Acq. date: 2026-08-20

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2067 since deposited on 2021-10-26
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Acq. date: 2026-08-20

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2 since deposited on 2021-10-26
Acq. date: 2026-08-20

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2067 since deposited on 2021-10-26
7last month
Acq. date: 2026-08-20

Citations