Publication:

OPC resist model separability validation after SMO source change

Date

2013

Proceedings Paper

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Files

26555.pdf 684.31 KB

Author(s)

Gillijns, Werner

;

Van de Kerkhove, Jeroen

;

Trivkovic, Darko

;

De Bisschop, Peter

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;

;

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Statistics

1928 since deposited on 2021-10-21

Acq. date: 2026-06-05